Abstract
A resistive probe that detects electric field by field-induced resistance changes in a small resistive region at the apex of the tip was reported. A method of imaging ferroelectric domains at high speed, which was named scanning resistive probe microscopy (SRPM) was demonstrated. The probe was designed and fabricated by self-aligning process that readily implemented the resistive region at the tip apex. The probe was contacted with a thermally oxidized silicon sample in order to measure the field sensitivity.
Original language | English |
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Pages (from-to) | 1734-1736 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 84 |
Issue number | 10 |
DOIs | |
State | Published - 8 Mar 2004 |