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Selective epitaxial growth of GaAs on a Si (001) surface formed by an in situ bake in a metal-organic chemical vapor deposition reactor

  • Young Dae Cho
  • , In Geun Lee
  • , Mi Jin Jung
  • , Hyunsu Shin
  • , Dong Hwan Jun
  • , Chan Soo Shin
  • , Kyung Ho Park
  • , Won Kyu Park
  • , Dae Hyun Kim
  • , Dae Hong Ko

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