Self-Powered Wireless Sensor Node Enabled by an Aerosol-Deposited PZT Flexible Energy Harvester

Geon Tae Hwang; Venkateswarlu Annapureddy; Jae Hyun Han; Daniel J. Joe; Changyeon Baek; Dae Yong Park; Dong Hyun Kim; Jung Hwan Park; Chang Kyu Jeong; Kwi Il Park; Jong Jin Choi; Do Kyung Kim; Jungho Ryu; Keon Jae Lee

doi:10.1002/aenm.201600237

Self-Powered Wireless Sensor Node Enabled by an Aerosol-Deposited PZT Flexible Energy Harvester

Geon Tae Hwang, Venkateswarlu Annapureddy, Jae Hyun Han, Daniel J. Joe, Changyeon Baek, Dae Yong Park, Dong Hyun Kim, Jung Hwan Park, Chang Kyu Jeong, Kwi Il Park, Jong Jin Choi, Do Kyung Kim, Jungho Ryu, Keon Jae Lee

Research output: Contribution to journal › Article › peer-review

203 Scopus citations

Abstract

A piezoelectric aerosol-deposited (AD) Pb(Zr_x,Ti_1-x)O₃ (PZT) film prepared with single-step deposition and postannealing was successfully utilized to fabricate a high-performance flexible piezoelectric harvester via a fast, simple, and cost-effective method. The high temperature-annealed AD PZT thick film on a rigid sapphire substrate was transferred onto a flexible substrate by the inoranic-based laser lift-off process. The flexible PZT harvester can convert a maximum output voltage of 200 V and a current signal of 35 ΜA from biomechanical bending motions, which are comparable to those of a similar interdigitated electrode-type flexible single-crystal energy harvester. The high-output performance of the energy harvester originates from the large grain growth of the PZT ceramic film under the high temperature annealing process at 900°C, which leads to outstanding piezoelectric harvesting properties with robust endurance for up to around 115,000 bending cycles on a flexible substrate.

Original language	English
Journal	Advanced Energy Materials
Volume	6
Issue number	13
DOIs	https://doi.org/10.1002/aenm.201600237
State	Published - 6 Jul 2016

Keywords

aerosol-deposited PZT
energy harvesting
piezoelectric films
self-powered devices
wireless sensor nodes

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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title = "Self-Powered Wireless Sensor Node Enabled by an Aerosol-Deposited PZT Flexible Energy Harvester",

abstract = "A piezoelectric aerosol-deposited (AD) Pb(Zrx,Ti1-x)O3 (PZT) film prepared with single-step deposition and postannealing was successfully utilized to fabricate a high-performance flexible piezoelectric harvester via a fast, simple, and cost-effective method. The high temperature-annealed AD PZT thick film on a rigid sapphire substrate was transferred onto a flexible substrate by the inoranic-based laser lift-off process. The flexible PZT harvester can convert a maximum output voltage of 200 V and a current signal of 35 ΜA from biomechanical bending motions, which are comparable to those of a similar interdigitated electrode-type flexible single-crystal energy harvester. The high-output performance of the energy harvester originates from the large grain growth of the PZT ceramic film under the high temperature annealing process at 900°C, which leads to outstanding piezoelectric harvesting properties with robust endurance for up to around 115,000 bending cycles on a flexible substrate.",

keywords = "aerosol-deposited PZT, energy harvesting, piezoelectric films, self-powered devices, wireless sensor nodes",

author = "Hwang, {Geon Tae} and Venkateswarlu Annapureddy and Han, {Jae Hyun} and Joe, {Daniel J.} and Changyeon Baek and Park, {Dae Yong} and Kim, {Dong Hyun} and Park, {Jung Hwan} and Jeong, {Chang Kyu} and Park, {Kwi Il} and Choi, {Jong Jin} and Kim, {Do Kyung} and Jungho Ryu and Lee, {Keon Jae}",

year = "2016",

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AU - Annapureddy, Venkateswarlu

AU - Han, Jae Hyun

AU - Joe, Daniel J.

AU - Baek, Changyeon

AU - Park, Dae Yong

AU - Kim, Dong Hyun

AU - Park, Jung Hwan

AU - Jeong, Chang Kyu

AU - Park, Kwi Il

AU - Choi, Jong Jin

AU - Kim, Do Kyung

AU - Ryu, Jungho

AU - Lee, Keon Jae

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N2 - A piezoelectric aerosol-deposited (AD) Pb(Zrx,Ti1-x)O3 (PZT) film prepared with single-step deposition and postannealing was successfully utilized to fabricate a high-performance flexible piezoelectric harvester via a fast, simple, and cost-effective method. The high temperature-annealed AD PZT thick film on a rigid sapphire substrate was transferred onto a flexible substrate by the inoranic-based laser lift-off process. The flexible PZT harvester can convert a maximum output voltage of 200 V and a current signal of 35 ΜA from biomechanical bending motions, which are comparable to those of a similar interdigitated electrode-type flexible single-crystal energy harvester. The high-output performance of the energy harvester originates from the large grain growth of the PZT ceramic film under the high temperature annealing process at 900°C, which leads to outstanding piezoelectric harvesting properties with robust endurance for up to around 115,000 bending cycles on a flexible substrate.

AB - A piezoelectric aerosol-deposited (AD) Pb(Zrx,Ti1-x)O3 (PZT) film prepared with single-step deposition and postannealing was successfully utilized to fabricate a high-performance flexible piezoelectric harvester via a fast, simple, and cost-effective method. The high temperature-annealed AD PZT thick film on a rigid sapphire substrate was transferred onto a flexible substrate by the inoranic-based laser lift-off process. The flexible PZT harvester can convert a maximum output voltage of 200 V and a current signal of 35 ΜA from biomechanical bending motions, which are comparable to those of a similar interdigitated electrode-type flexible single-crystal energy harvester. The high-output performance of the energy harvester originates from the large grain growth of the PZT ceramic film under the high temperature annealing process at 900°C, which leads to outstanding piezoelectric harvesting properties with robust endurance for up to around 115,000 bending cycles on a flexible substrate.

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KW - wireless sensor nodes

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Self-Powered Wireless Sensor Node Enabled by an Aerosol-Deposited PZT Flexible Energy Harvester

Abstract

Keywords

UN SDGs

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