TY - GEN
T1 - Sensitivity improvement of MEMS-based tilt sensor using air medium
AU - Jung, Dae Woong
AU - Choi, Ju Chan
AU - Lee, June Kyoo
AU - Jung, Ho
AU - Kong, Seong Ho
PY - 2009
Y1 - 2009
N2 - A convection based multi-axis tilt sensor using air medium has many advantages, such as small size, simple structure, low cost, reliability and durability. In this paper, a study focused on optimizing two different parameters, the geometry of temperature sensors and air volume of encapsulated micro-chamber filled with air medium, is mainly reported.
AB - A convection based multi-axis tilt sensor using air medium has many advantages, such as small size, simple structure, low cost, reliability and durability. In this paper, a study focused on optimizing two different parameters, the geometry of temperature sensors and air volume of encapsulated micro-chamber filled with air medium, is mainly reported.
UR - http://www.scopus.com/inward/record.url?scp=77951109577&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2009.5398205
DO - 10.1109/ICSENS.2009.5398205
M3 - Conference contribution
AN - SCOPUS:77951109577
SN - 9781424445486
T3 - Proceedings of IEEE Sensors
SP - 164
EP - 167
BT - IEEE Sensors 2009 Conference - SENSORS 2009
T2 - IEEE Sensors 2009 Conference - SENSORS 2009
Y2 - 25 October 2009 through 28 October 2009
ER -