Sequential design method for geometric optimization of an electrothermal microactuator based on dynamic kriging models

Engineering

• Polysilicon 100%
• Design Method 100%
• Robust Design 100%
• Initial Design 50%
• Confidence Level 50%
• Random Variable ξ 50%
• Power Level 50%
• Numerical Efficiency 50%
• Surrogate Model 50%
• Fabrication Tolerance 50%
• Reliability Based Design 50%
• Based Design Optimization 50%