Shallow n+/p junction formation using PH3 plasma doping technique

Jeong Eun Kim; Ho Jung; Seung Woo Do; Jae Geun Oh; Sun Hwan Hwang; Jin Ku Lee; Ja Choon Ku; Jong Ho Lee; Yong Hyun Lee; Seong Ho Kong

doi:10.1109/IMNC.2007.4456166

Shallow n⁺/p junction formation using PH₃ plasma doping technique

Jeong Eun Kim, Ho Jung, Seung Woo Do, Jae Geun Oh, Sun Hwan Hwang, Jin Ku Lee, Ja Choon Ku, Jong Ho Lee, Yong Hyun Lee, Seong Ho Kong

School of Electronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	186-187
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456166
State	Published - 2007
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 5 Nov 2007 → 8 Nov 2007

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conference	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	5/11/07 → 8/11/07

Access to Document

10.1109/IMNC.2007.4456166

Cite this

Kim, J. E., Jung, H., Do, S. W., Oh, J. G., Hwang, S. H., Lee, J. K., Ku, J. C., Lee, J. H., Lee, Y. H., & Kong, S. H. (2007). Shallow n⁺/p junction formation using PH₃ plasma doping technique. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 186-187). Article 4456166 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456166

Kim, Jeong Eun ; Jung, Ho ; Do, Seung Woo et al. / Shallow n⁺/p junction formation using PH₃ plasma doping technique. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 186-187 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

@inproceedings{0586c02a0aff46418653c08d06258f11,

title = "Shallow n+/p junction formation using PH3 plasma doping technique",

author = "Kim, {Jeong Eun} and Ho Jung and Do, {Seung Woo} and Oh, {Jae Geun} and Hwang, {Sun Hwan} and Lee, {Jin Ku} and Ku, {Ja Choon} and Lee, {Jong Ho} and Lee, {Yong Hyun} and Kong, {Seong Ho}",

year = "2007",

doi = "10.1109/IMNC.2007.4456166",

language = "English",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "186--187",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

Kim, JE, Jung, H, Do, SW, Oh, JG, Hwang, SH, Lee, JK, Ku, JC, Lee, JH, Lee, YH & Kong, SH 2007, Shallow n⁺/p junction formation using PH₃ plasma doping technique. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456166, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 186-187, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 5/11/07. https://doi.org/10.1109/IMNC.2007.4456166

Shallow n⁺/p junction formation using PH₃ plasma doping technique. / Kim, Jeong Eun; Jung, Ho; Do, Seung Woo et al.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 186-187 4456166 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Shallow n+/p junction formation using PH3 plasma doping technique

AU - Kim, Jeong Eun

AU - Jung, Ho

AU - Do, Seung Woo

AU - Oh, Jae Geun

AU - Hwang, Sun Hwan

AU - Lee, Jin Ku

AU - Ku, Ja Choon

AU - Lee, Jong Ho

AU - Lee, Yong Hyun

AU - Kong, Seong Ho

PY - 2007

Y1 - 2007

UR - http://www.scopus.com/inward/record.url?scp=47349132523&partnerID=8YFLogxK

U2 - 10.1109/IMNC.2007.4456166

DO - 10.1109/IMNC.2007.4456166

M3 - Conference contribution

AN - SCOPUS:47349132523

SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

SP - 186

EP - 187

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -

Kim JE, Jung H, Do SW, Oh JG, Hwang SH, Lee JK et al. Shallow n⁺/p junction formation using PH₃ plasma doping technique. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 186-187. 4456166. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456166