Shallow n+/p junction formation using PH3 plasma doping technique

Jeong Eun Kim; Ho Jung; Seung Woo Do; Jae Geun Oh; Sun Hwan Hwang; Jin Ku Lee; Ja Choon Ku; Jong Ho Lee; Yong Hyun Lee; Seong Ho Kong

doi:10.1109/IMNC.2007.4456166

Shallow n⁺/p junction formation using PH₃ plasma doping technique

Jeong Eun Kim
, Ho Jung
, Seung Woo Do
, Jae Geun Oh
, Sun Hwan Hwang
, Jin Ku Lee
, Ja Choon Ku
, Jong Ho Lee
, Yong Hyun Lee
, Seong Ho Kong

School of Electronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	186-187
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456166
State	Published - 2007
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 5 Nov 2007 → 8 Nov 2007

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conference	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	5/11/07 → 8/11/07

Access to Document

10.1109/IMNC.2007.4456166

Cite this

Kim, J. E., Jung, H., Do, S. W., Oh, J. G., Hwang, S. H., Lee, J. K., Ku, J. C., Lee, J. H., Lee, Y. H., & Kong, S. H. (2007). Shallow n⁺/p junction formation using PH₃ plasma doping technique. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 186-187). Article 4456166 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456166

Kim, Jeong Eun ; Jung, Ho ; Do, Seung Woo et al. / Shallow n⁺/p junction formation using PH₃ plasma doping technique. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 186-187 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

@inproceedings{0586c02a0aff46418653c08d06258f11,

title = "Shallow n+/p junction formation using PH3 plasma doping technique",

author = "Kim, \{Jeong Eun\} and Ho Jung and Do, \{Seung Woo\} and Oh, \{Jae Geun\} and Hwang, \{Sun Hwan\} and Lee, \{Jin Ku\} and Ku, \{Ja Choon\} and Lee, \{Jong Ho\} and Lee, \{Yong Hyun\} and Kong, \{Seong Ho\}",

year = "2007",

doi = "10.1109/IMNC.2007.4456166",

language = "English",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "186--187",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

Kim, JE, Jung, H, Do, SW, Oh, JG, Hwang, SH, Lee, JK, Ku, JC, Lee, JH, Lee, YH & Kong, SH 2007, Shallow n⁺/p junction formation using PH₃ plasma doping technique. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456166, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 186-187, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 5/11/07. https://doi.org/10.1109/IMNC.2007.4456166

Shallow n⁺/p junction formation using PH₃ plasma doping technique. / Kim, Jeong Eun; Jung, Ho; Do, Seung Woo et al.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 186-187 4456166 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Shallow n+/p junction formation using PH3 plasma doping technique

AU - Kim, Jeong Eun

AU - Jung, Ho

AU - Do, Seung Woo

AU - Oh, Jae Geun

AU - Hwang, Sun Hwan

AU - Lee, Jin Ku

AU - Ku, Ja Choon

AU - Lee, Jong Ho

AU - Lee, Yong Hyun

AU - Kong, Seong Ho

PY - 2007

Y1 - 2007

UR - https://www.scopus.com/pages/publications/47349132523

U2 - 10.1109/IMNC.2007.4456166

DO - 10.1109/IMNC.2007.4456166

M3 - Conference contribution

AN - SCOPUS:47349132523

SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

SP - 186

EP - 187

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -