@inproceedings{7e393b2184c44f5ba54ec8b927a504f5,
title = "Simulation and Analysis of MEMS-Based Flexible Capacitive Pressure Sensors with COMSOL",
abstract = "We employ COMSOL Multiphysics to develop and analyze a novel tri-layered MEMS-based capacitive pressure sensor. The sensor comprises gold electrodes, a composite dielectric layer consisting of silver nanowires (AgNWs) embedded in thermoplastic polyurethane (TPU), and a polydimethylsiloxane substrate. This study investigates the impact of variations in design parameters of the AgNW/TPU dielectric layer - specifically thickness and area - on sensor performance from 0 Pa to 15 kPa. The focus is on the sensor's response across different pressure levels, particularly at the maximum of 15 kPa. Preliminary simulation results indicate potential for performance enhancement. Future work will further optimize sensor sensitivity and accuracy by simulating additional three-dimensional dielectric layer configurations.",
keywords = "3D modeling, COMSOL Multiphysics, flexible sensors, MEMS, sensor durability",
author = "Ding, \{Liang Xiao\} and Chee, \{K. W.A.\}",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 International Convention on Rehabilitation Engineering and Assistive Technology and World Rehabilitation Robot Convention, i-CREATE and WRRC 2024 ; Conference date: 23-08-2024 Through 26-08-2024",
year = "2024",
doi = "10.1109/WRRC62201.2024.10696480",
language = "English",
series = "2024 International Convention on Rehabilitation Engineering and Assistive Technology and World Rehabilitation Robot Convention, WRRC 2024 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 International Convention on Rehabilitation Engineering and Assistive Technology and World Rehabilitation Robot Convention, WRRC 2024 - Proceedings",
address = "United States",
}