Abstract
Zn 2+ and Sb 5+ were co-doped in In 2Oi ceramics. To maintain their charge neutrality, they were substituted for In 3+ with a Sb 5+:Zn 2+ = 1:2 ratio. The solubility limit of the dopants and the phase development, sintering behavior, and electrical characteristics of the co-doped In 2O 3 specimens were examined. From the X-ray diffraction analysis, the solubility limit was found to have been about 5 at% for Sb and 10 at% for Zn. Over the solubility limit, the β-Zn 7Sb 2O 12 phase appeared as a second phase. Within the solubility limit, the lattice constant of the In2O3 phase decreased as the amount of the dopants increased. The second phase suppressed the grain growth during the sintering and contributed to the decrease in the electron mobility.
Original language | English |
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Pages (from-to) | 348-352 |
Number of pages | 5 |
Journal | Journal of Nanoelectronics and Optoelectronics |
Volume | 6 |
Issue number | 3 |
DOIs | |
State | Published - Aug 2011 |
Keywords
- Charge Compensation
- Co-Doping
- Microstructure
- Solubility
- Transparent Conducting Oxide