Abstract
We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm.
Original language | English |
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Pages (from-to) | 1113-1116 |
Number of pages | 4 |
Journal | Chinese Optics Letters |
Volume | 7 |
Issue number | 12 |
DOIs | |
State | Published - Dec 2009 |