Spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm

Joonku Hahn, Hwi Kim, Yongjun Lim, Eun Hee Kim, Byoungho Lee

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm.

Original languageEnglish
Pages (from-to)1113-1116
Number of pages4
JournalChinese Optics Letters
Volume7
Issue number12
DOIs
StatePublished - Dec 2009

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