Specific contact resistance of Ti/Al/Pt/Au ohmic contacts to phosphorus-doped ZnO thin films

K. Ip, Y. W. Heo, K. H. Baik, D. P. Norton, S. J. Pearton, F. Ren

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Original language	English
Pages (from-to)	171-174
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	22
Issue number	1
DOIs	https://doi.org/10.1116/1.1641060
State	Published - 2004

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author = "K. Ip and Heo, {Y. W.} and Baik, {K. H.} and Norton, {D. P.} and Pearton, {S. J.} and F. Ren",

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AU - Norton, D. P.

AU - Pearton, S. J.

AU - Ren, F.

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