@article{910add22f03c408c83221d565ef85091,
title = "Specific contact resistance of Ti/Al/Pt/Au ohmic contacts to phosphorus-doped ZnO thin films",
author = "K. Ip and Heo, \{Y. W.\} and Baik, \{K. H.\} and Norton, \{D. P.\} and Pearton, \{S. J.\} and F. Ren",
year = "2004",
doi = "10.1116/1.1641060",
language = "English",
volume = "22",
pages = "171--174",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "1",
}