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Specific contact resistance of Ti/Al/Pt/Au ohmic contacts to phosphorus-doped ZnO thin films

  • K. Ip
  • , Y. W. Heo
  • , K. H. Baik
  • , D. P. Norton
  • , S. J. Pearton
  • , F. Ren
  • University of Florida

Research output: Contribution to journalArticlepeer-review

16 Scopus citations
Original languageEnglish
Pages (from-to)171-174
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number1
DOIs
StatePublished - 2004

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