@inproceedings{3f83f07504784a38a462e0361f8efec8,
title = "Spectral performance of a silicon IR microspectrometer",
abstract = "The performance of an optical IR microspectrometer fabricated in silicon using IC-compatible micromachining is presented. The components are distributed over two silicon wafers. One contains an aluminum-based grating and the other an array of poly-silicon thermocouples with readout circuits. The optical path is defined after low-temperature aligned wafer-to-wafer bonding. Design considerations, fabrication and performance are presented. Measurements confirm an IR operating range between 1 and 9 μm and a half-power spectral resolution of 0.5 μm.",
keywords = "Biomedical optical imaging, Extraterrestrial measurements, Gratings, Integrated optics, Optical device fabrication, Optical refraction, Optical sensors, Sensor arrays, Silicon, Spectroscopy",
author = "Kong, {S. H.} and {De Graaf}, G. and Wolffenbuttel, {R. F.}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1217089",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1610--1613",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "United States",
}