Spectral performance of a silicon IR microspectrometer

S. H. Kong, G. De Graaf, R. F. Wolffenbuttel

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

The performance of an optical IR microspectrometer fabricated in silicon using IC-compatible micromachining is presented. The components are distributed over two silicon wafers. One contains an aluminum-based grating and the other an array of poly-silicon thermocouples with readout circuits. The optical path is defined after low-temperature aligned wafer-to-wafer bonding. Design considerations, fabrication and performance are presented. Measurements confirm an IR operating range between 1 and 9 μm and a half-power spectral resolution of 0.5 μm.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1610-1613
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 8 Jun 200312 Jun 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Conference

Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/TerritoryUnited States
CityBoston
Period8/06/0312/06/03

Keywords

  • Biomedical optical imaging
  • Extraterrestrial measurements
  • Gratings
  • Integrated optics
  • Optical device fabrication
  • Optical refraction
  • Optical sensors
  • Sensor arrays
  • Silicon
  • Spectroscopy

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