Spectroscopic ellipsometry of thin film and bulk anatase (TiO2)

G. E. Jellison; L. A. Boatner; J. D. Budai; B. S. Jeong; D. P. Norton

doi:10.1063/1.1573737

Spectroscopic ellipsometry of thin film and bulk anatase (TiO₂)

G. E. Jellison, L. A. Boatner, J. D. Budai, B. S. Jeong, D. P. Norton

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250 Scopus citations

Abstract

The spectroscopic ellipsometry measurements of the thin films and TiO₂ single crystals were discussed. Two-modulator generalized ellipsometer was used. Results showed that the material is oriented with the c axis which is perpendicular to the substrate, anisotropy near the surface and interface was also found.

Original language	English
Pages (from-to)	9537-9541
Number of pages	5
Journal	Journal of Applied Physics
Volume	93
Issue number	12
DOIs	https://doi.org/10.1063/1.1573737
State	Published - 15 Jun 2003

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abstract = "The spectroscopic ellipsometry measurements of the thin films and TiO2 single crystals were discussed. Two-modulator generalized ellipsometer was used. Results showed that the material is oriented with the c axis which is perpendicular to the substrate, anisotropy near the surface and interface was also found.",

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AU - Norton, D. P.

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Spectroscopic ellipsometry of thin film and bulk anatase (TiO₂)

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