Spectroscopic ellipsometry of thin film and bulk anatase (TiO2)

G. E. Jellison; L. A. Boatner; J. D. Budai; B. S. Jeong; D. P. Norton

doi:10.1063/1.1573737

Spectroscopic ellipsometry of thin film and bulk anatase (TiO₂)

G. E. Jellison
, L. A. Boatner
, J. D. Budai
, B. S. Jeong
, D. P. Norton

Oak Ridge National Laboratory
University of Florida

Research output: Contribution to journal › Article › peer-review

255 Scopus citations

Abstract

The spectroscopic ellipsometry measurements of the thin films and TiO₂ single crystals were discussed. Two-modulator generalized ellipsometer was used. Results showed that the material is oriented with the c axis which is perpendicular to the substrate, anisotropy near the surface and interface was also found.

Original language	English
Pages (from-to)	9537-9541
Number of pages	5
Journal	Journal of Applied Physics
Volume	93
Issue number	12
DOIs	https://doi.org/10.1063/1.1573737
State	Published - 15 Jun 2003

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title = "Spectroscopic ellipsometry of thin film and bulk anatase (TiO2)",

abstract = "The spectroscopic ellipsometry measurements of the thin films and TiO2 single crystals were discussed. Two-modulator generalized ellipsometer was used. Results showed that the material is oriented with the c axis which is perpendicular to the substrate, anisotropy near the surface and interface was also found.",

author = "Jellison, \{G. E.\} and Boatner, \{L. A.\} and Budai, \{J. D.\} and Jeong, \{B. S.\} and Norton, \{D. P.\}",

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AU - Jellison, G. E.

AU - Boatner, L. A.

AU - Budai, J. D.

AU - Jeong, B. S.

AU - Norton, D. P.

PY - 2003/6/15

Y1 - 2003/6/15

N2 - The spectroscopic ellipsometry measurements of the thin films and TiO2 single crystals were discussed. Two-modulator generalized ellipsometer was used. Results showed that the material is oriented with the c axis which is perpendicular to the substrate, anisotropy near the surface and interface was also found.

AB - The spectroscopic ellipsometry measurements of the thin films and TiO2 single crystals were discussed. Two-modulator generalized ellipsometer was used. Results showed that the material is oriented with the c axis which is perpendicular to the substrate, anisotropy near the surface and interface was also found.

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U2 - 10.1063/1.1573737

DO - 10.1063/1.1573737

M3 - Article

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SP - 9537

EP - 9541

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 12

ER -

Spectroscopic ellipsometry of thin film and bulk anatase (TiO₂)

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