Structural evolution of ZnO/sapphire(001) heteroepitaxy studied by real time synchrotron x-ray scattering

Sang Il Park; Tae Sik Cho; Seok Joo Doh; Jong Lam Lee; Jung Ho Je

doi:10.1063/1.126972

Structural evolution of ZnO/sapphire(001) heteroepitaxy studied by real time synchrotron x-ray scattering

Sang Il Park
, Tae Sik Cho
, Seok Joo Doh
, Jong Lam Lee
, Jung Ho Je

Department of Nano & Advanced Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

56 Scopus citations

Abstract

The structural evolution during heteroepitaxial growth of ZnO/sapphire(001) by radio-frequency magnetron sputtering has been studied using real-time synchrotron x-ray scattering. The two-dimensional (2D) ZnO(002) layers grown in the initial stage are highly strained and well aligned to the substrate having a mosaic distribution of 0.01° full width at half maximum (FWHM), in sharp contrast to the reported transition 2D layers grown by molecular-beam epitaxy. With increasing film thickness, the lattice strain is relieved and the poorly aligned (1.25° FWHM) three-dimensional (3D) islands are nucleated on the 2D layers. We attribute the 2D-3D transition to the release of the strain energy stored in the film due to the film/substrate lattice mismatch.

Original language	English
Pages (from-to)	349-351
Number of pages	3
Journal	Applied Physics Letters
Volume	77
Issue number	3
DOIs	https://doi.org/10.1063/1.126972
State	Published - 17 Jul 2000

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title = "Structural evolution of ZnO/sapphire(001) heteroepitaxy studied by real time synchrotron x-ray scattering",

abstract = "The structural evolution during heteroepitaxial growth of ZnO/sapphire(001) by radio-frequency magnetron sputtering has been studied using real-time synchrotron x-ray scattering. The two-dimensional (2D) ZnO(002) layers grown in the initial stage are highly strained and well aligned to the substrate having a mosaic distribution of 0.01° full width at half maximum (FWHM), in sharp contrast to the reported transition 2D layers grown by molecular-beam epitaxy. With increasing film thickness, the lattice strain is relieved and the poorly aligned (1.25° FWHM) three-dimensional (3D) islands are nucleated on the 2D layers. We attribute the 2D-3D transition to the release of the strain energy stored in the film due to the film/substrate lattice mismatch.",

author = "Park, \{Sang Il\} and Cho, \{Tae Sik\} and Doh, \{Seok Joo\} and Lee, \{Jong Lam\} and Je, \{Jung Ho\}",

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doi = "10.1063/1.126972",

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T1 - Structural evolution of ZnO/sapphire(001) heteroepitaxy studied by real time synchrotron x-ray scattering

AU - Park, Sang Il

AU - Cho, Tae Sik

AU - Doh, Seok Joo

AU - Lee, Jong Lam

AU - Je, Jung Ho

PY - 2000/7/17

Y1 - 2000/7/17

N2 - The structural evolution during heteroepitaxial growth of ZnO/sapphire(001) by radio-frequency magnetron sputtering has been studied using real-time synchrotron x-ray scattering. The two-dimensional (2D) ZnO(002) layers grown in the initial stage are highly strained and well aligned to the substrate having a mosaic distribution of 0.01° full width at half maximum (FWHM), in sharp contrast to the reported transition 2D layers grown by molecular-beam epitaxy. With increasing film thickness, the lattice strain is relieved and the poorly aligned (1.25° FWHM) three-dimensional (3D) islands are nucleated on the 2D layers. We attribute the 2D-3D transition to the release of the strain energy stored in the film due to the film/substrate lattice mismatch.

AB - The structural evolution during heteroepitaxial growth of ZnO/sapphire(001) by radio-frequency magnetron sputtering has been studied using real-time synchrotron x-ray scattering. The two-dimensional (2D) ZnO(002) layers grown in the initial stage are highly strained and well aligned to the substrate having a mosaic distribution of 0.01° full width at half maximum (FWHM), in sharp contrast to the reported transition 2D layers grown by molecular-beam epitaxy. With increasing film thickness, the lattice strain is relieved and the poorly aligned (1.25° FWHM) three-dimensional (3D) islands are nucleated on the 2D layers. We attribute the 2D-3D transition to the release of the strain energy stored in the film due to the film/substrate lattice mismatch.

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DO - 10.1063/1.126972

M3 - Article

AN - SCOPUS:0010522057

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EP - 351

JO - Applied Physics Letters

JF - Applied Physics Letters

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ER -

Structural evolution of ZnO/sapphire(001) heteroepitaxy studied by real time synchrotron x-ray scattering

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