Abstract
A RuO2/GaN Schottky diode was designed and fabricated for application as a UV photodetector. The fabricated RuO2/GaN Schottky diode showed a breakdown at over -50 V, plus a leakage current of 9 nA/cm2 at -5 V with a good uniformity that was one order of magnitude lower than that of a Pt/GaN Schottky diode under the same epitaxial conditions. The proposed RuO2/GaN Schottky photodiode also exhibited a UV-visible rejection ratio of 3 × 105 and responsivity of 0.23 A/W at 330 nm.
Original language | English |
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Pages (from-to) | 341-344 |
Number of pages | 4 |
Journal | Physica Status Solidi (A) Applied Research |
Volume | 188 |
Issue number | 1 |
DOIs | |
State | Published - Nov 2001 |