Surface reaction mechanisms of hydrazine on Si(100)-2×1 surface: NH3 desorption pathways

Chultack Lim; Cheol Ho Choi

doi:10.1063/1.1631917

Surface reaction mechanisms of hydrazine on Si(100)-2×1 surface: NH₃ desorption pathways

Chultack Lim, Cheol Ho Choi

Kyungpook National University

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

The high reactivity of N₂H₄ on Si surface turned out to be due to the additional nucleophilic/basic nitrogen, which reduce activation barriers of subsequent surface reactions. It was illustrated that better understanding of the complex surface reactions requires not only the initial surface reactions but also various subsequent surface reactions. It was shown that the overall surface reactivity can be controlled by introducing additional nucleophilic/basic substituents.

Original language	English
Pages (from-to)	979-987
Number of pages	9
Journal	Journal of Chemical Physics
Volume	120
Issue number	2
DOIs	https://doi.org/10.1063/1.1631917
State	Published - 8 Jan 2004

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10.1063/1.1631917

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title = "Surface reaction mechanisms of hydrazine on Si(100)-2×1 surface: NH3 desorption pathways",

abstract = "The high reactivity of N2H4 on Si surface turned out to be due to the additional nucleophilic/basic nitrogen, which reduce activation barriers of subsequent surface reactions. It was illustrated that better understanding of the complex surface reactions requires not only the initial surface reactions but also various subsequent surface reactions. It was shown that the overall surface reactivity can be controlled by introducing additional nucleophilic/basic substituents.",

author = "Chultack Lim and Choi, {Cheol Ho}",

year = "2004",

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doi = "10.1063/1.1631917",

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T2 - NH3 desorption pathways

AU - Lim, Chultack

AU - Choi, Cheol Ho

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Y1 - 2004/1/8

N2 - The high reactivity of N2H4 on Si surface turned out to be due to the additional nucleophilic/basic nitrogen, which reduce activation barriers of subsequent surface reactions. It was illustrated that better understanding of the complex surface reactions requires not only the initial surface reactions but also various subsequent surface reactions. It was shown that the overall surface reactivity can be controlled by introducing additional nucleophilic/basic substituents.

AB - The high reactivity of N2H4 on Si surface turned out to be due to the additional nucleophilic/basic nitrogen, which reduce activation barriers of subsequent surface reactions. It was illustrated that better understanding of the complex surface reactions requires not only the initial surface reactions but also various subsequent surface reactions. It was shown that the overall surface reactivity can be controlled by introducing additional nucleophilic/basic substituents.

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SN - 0021-9606

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EP - 987

JO - Journal of Chemical Physics

JF - Journal of Chemical Physics

IS - 2

ER -

Surface reaction mechanisms of hydrazine on Si(100)-2×1 surface: NH₃ desorption pathways

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