Synthesis of polyvinylidene fluoride film using novel atmospheric pressure plasma deposition with direct-injection nozzle

Gyu Tae Bae; Choon Sang Park; Eun Young Jung; Daseulbi Kim; Hyo Jun Jang; Bhum Jae Shin; Heung Sik Tae

doi:10.1080/15421406.2021.1972207

Synthesis of polyvinylidene fluoride film using novel atmospheric pressure plasma deposition with direct-injection nozzle

Gyu Tae Bae
, Choon Sang Park
, Eun Young Jung
, Daseulbi Kim
, Hyo Jun Jang
, Bhum Jae Shin
, Heung Sik Tae

School of Electronics Engineering

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

This paper proposes a new atmospheric pressure plasma (APP) deposition system with direct-injection nozzle (modified-APPDS) for depositing the polyvinylidene fluoride (PVDF) thin film. In the modified-APPDS, the key parameters such as length of guide-tube, distance of bluff-body, gas composition, and gas flow rates are examined for generating glow-like intense plasma. As a result, the intense glow-like plasma generated broadly by the modified-APPDS can uniformly deposit the PVDF thin film, which is confirmed by field emission-scanning electron microscopy (FE-SEM) and Fourier transforms-infrared spectroscopy (FT-IR).

Original language	English
Pages (from-to)	125-133
Number of pages	9
Journal	Molecular Crystals and Liquid Crystals
Volume	733
Issue number	1
DOIs	https://doi.org/10.1080/15421406.2021.1972207
State	Published - 2022

Keywords

Atmospheric pressure
direct-injection nozzle
flexible optoelectronic device
plasma deposition
PVDF thin film

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10.1080/15421406.2021.1972207

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title = "Synthesis of polyvinylidene fluoride film using novel atmospheric pressure plasma deposition with direct-injection nozzle",

abstract = "This paper proposes a new atmospheric pressure plasma (APP) deposition system with direct-injection nozzle (modified-APPDS) for depositing the polyvinylidene fluoride (PVDF) thin film. In the modified-APPDS, the key parameters such as length of guide-tube, distance of bluff-body, gas composition, and gas flow rates are examined for generating glow-like intense plasma. As a result, the intense glow-like plasma generated broadly by the modified-APPDS can uniformly deposit the PVDF thin film, which is confirmed by field emission-scanning electron microscopy (FE-SEM) and Fourier transforms-infrared spectroscopy (FT-IR).",

keywords = "Atmospheric pressure, direct-injection nozzle, flexible optoelectronic device, plasma deposition, PVDF thin film",

author = "Bae, \{Gyu Tae\} and Park, \{Choon Sang\} and Jung, \{Eun Young\} and Daseulbi Kim and Jang, \{Hyo Jun\} and Shin, \{Bhum Jae\} and Tae, \{Heung Sik\}",

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year = "2022",

doi = "10.1080/15421406.2021.1972207",

language = "English",

volume = "733",

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TY - JOUR

T1 - Synthesis of polyvinylidene fluoride film using novel atmospheric pressure plasma deposition with direct-injection nozzle

AU - Bae, Gyu Tae

AU - Park, Choon Sang

AU - Jung, Eun Young

AU - Kim, Daseulbi

AU - Jang, Hyo Jun

AU - Shin, Bhum Jae

AU - Tae, Heung Sik

PY - 2022

Y1 - 2022

N2 - This paper proposes a new atmospheric pressure plasma (APP) deposition system with direct-injection nozzle (modified-APPDS) for depositing the polyvinylidene fluoride (PVDF) thin film. In the modified-APPDS, the key parameters such as length of guide-tube, distance of bluff-body, gas composition, and gas flow rates are examined for generating glow-like intense plasma. As a result, the intense glow-like plasma generated broadly by the modified-APPDS can uniformly deposit the PVDF thin film, which is confirmed by field emission-scanning electron microscopy (FE-SEM) and Fourier transforms-infrared spectroscopy (FT-IR).

AB - This paper proposes a new atmospheric pressure plasma (APP) deposition system with direct-injection nozzle (modified-APPDS) for depositing the polyvinylidene fluoride (PVDF) thin film. In the modified-APPDS, the key parameters such as length of guide-tube, distance of bluff-body, gas composition, and gas flow rates are examined for generating glow-like intense plasma. As a result, the intense glow-like plasma generated broadly by the modified-APPDS can uniformly deposit the PVDF thin film, which is confirmed by field emission-scanning electron microscopy (FE-SEM) and Fourier transforms-infrared spectroscopy (FT-IR).

KW - Atmospheric pressure

KW - direct-injection nozzle

KW - flexible optoelectronic device

KW - plasma deposition

KW - PVDF thin film

UR - https://www.scopus.com/pages/publications/85121373076

U2 - 10.1080/15421406.2021.1972207

DO - 10.1080/15421406.2021.1972207

M3 - Article

AN - SCOPUS:85121373076

SN - 1542-1406

VL - 733

SP - 125

EP - 133

JO - Molecular Crystals and Liquid Crystals

JF - Molecular Crystals and Liquid Crystals

IS - 1

ER -

Synthesis of polyvinylidene fluoride film using novel atmospheric pressure plasma deposition with direct-injection nozzle

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Keywords

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