Synthesis of submicron-sized rods and trees of Cu2O by radio-frequency magnetron sputtering

Vu Xuan Hien; Jae Lok You; Kwang Min Jo; Se Yun Kim; Joon Hyung Lee; Jeong Joo Kim; Young Woo Heo

doi:10.1016/j.vacuum.2014.09.015

Synthesis of submicron-sized rods and trees of Cu₂O by radio-frequency magnetron sputtering

Vu Xuan Hien, Jae Lok You, Kwang Min Jo, Se Yun Kim, Joon Hyung Lee, Jeong Joo Kim, Young Woo Heo

Kyungpook National University

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Typical sputtering conditions based on substrate temperature, sputtering time and oxygen partial pressure to grow thin film, submicron-sized rods and trees of Cu₂O on glass substrates from metallic Cu targets were investigated. The submicron-rods with diameters of 100-700 nm and lengths of 2-8 μm were synthesized. The abundance of Cu species, which is modulated by the Ar/O₂ ratio during the sputtering process affects directly to the growths of the Cu₂O branches on the bodies of the submicronrods. Transmission electron microscopy and elemental mapping reveal that metallic Cu is existed on the heads of the Cu₂O rods. Finally, the formation model of the submicron-sized rods and trees of Cu₂O is discussed.

Original language	English
Pages (from-to)	60-67
Number of pages	8
Journal	Vacuum
Volume	111
DOIs	https://doi.org/10.1016/j.vacuum.2014.09.015
State	Published - Jan 2015

Keywords

Crystal growth
Microstructure
Sputtering
Structural
Thick films

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10.1016/j.vacuum.2014.09.015

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title = "Synthesis of submicron-sized rods and trees of Cu2O by radio-frequency magnetron sputtering",

abstract = "Typical sputtering conditions based on substrate temperature, sputtering time and oxygen partial pressure to grow thin film, submicron-sized rods and trees of Cu2O on glass substrates from metallic Cu targets were investigated. The submicron-rods with diameters of 100-700 nm and lengths of 2-8 μm were synthesized. The abundance of Cu species, which is modulated by the Ar/O2 ratio during the sputtering process affects directly to the growths of the Cu2O branches on the bodies of the submicronrods. Transmission electron microscopy and elemental mapping reveal that metallic Cu is existed on the heads of the Cu2O rods. Finally, the formation model of the submicron-sized rods and trees of Cu2O is discussed.",

keywords = "Crystal growth, Microstructure, Sputtering, Structural, Thick films",

author = "Hien, \{Vu Xuan\} and You, \{Jae Lok\} and Jo, \{Kwang Min\} and Kim, \{Se Yun\} and Lee, \{Joon Hyung\} and Kim, \{Jeong Joo\} and Heo, \{Young Woo\}",

year = "2015",

month = jan,

doi = "10.1016/j.vacuum.2014.09.015",

language = "English",

volume = "111",

pages = "60--67",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Ltd.",

}

TY - JOUR

T1 - Synthesis of submicron-sized rods and trees of Cu2O by radio-frequency magnetron sputtering

AU - Hien, Vu Xuan

AU - You, Jae Lok

AU - Jo, Kwang Min

AU - Kim, Se Yun

AU - Lee, Joon Hyung

AU - Kim, Jeong Joo

AU - Heo, Young Woo

PY - 2015/1

Y1 - 2015/1

N2 - Typical sputtering conditions based on substrate temperature, sputtering time and oxygen partial pressure to grow thin film, submicron-sized rods and trees of Cu2O on glass substrates from metallic Cu targets were investigated. The submicron-rods with diameters of 100-700 nm and lengths of 2-8 μm were synthesized. The abundance of Cu species, which is modulated by the Ar/O2 ratio during the sputtering process affects directly to the growths of the Cu2O branches on the bodies of the submicronrods. Transmission electron microscopy and elemental mapping reveal that metallic Cu is existed on the heads of the Cu2O rods. Finally, the formation model of the submicron-sized rods and trees of Cu2O is discussed.

AB - Typical sputtering conditions based on substrate temperature, sputtering time and oxygen partial pressure to grow thin film, submicron-sized rods and trees of Cu2O on glass substrates from metallic Cu targets were investigated. The submicron-rods with diameters of 100-700 nm and lengths of 2-8 μm were synthesized. The abundance of Cu species, which is modulated by the Ar/O2 ratio during the sputtering process affects directly to the growths of the Cu2O branches on the bodies of the submicronrods. Transmission electron microscopy and elemental mapping reveal that metallic Cu is existed on the heads of the Cu2O rods. Finally, the formation model of the submicron-sized rods and trees of Cu2O is discussed.

KW - Crystal growth

KW - Microstructure

KW - Sputtering

KW - Structural

KW - Thick films

UR - https://www.scopus.com/pages/publications/84908409002

U2 - 10.1016/j.vacuum.2014.09.015

DO - 10.1016/j.vacuum.2014.09.015

M3 - Article

AN - SCOPUS:84908409002

SN - 0042-207X

VL - 111

SP - 60

EP - 67

JO - Vacuum

JF - Vacuum

ER -

Synthesis of submicron-sized rods and trees of Cu₂O by radio-frequency magnetron sputtering

Abstract

Keywords

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