Abstract
We report on the structural and electrical properties of amorphous Yttria-stabilized zirconia (YSZ) thin films which are the potential high-k gate dielectric material of organic thin film transistor (OTFT). To investigate the influence of t he oxygen flow rate o n the s tructural and electrical properties of the YSZ films, XRD, XPS, J-E, I-V were carried out in this work. Oxygen vacancies are expected to be the most predominant type of defect in metal-oxide dielectrics. The leakage current density decreased mainly because of the reduction of oxygen vacancies with increasing oxygen flow rate.
Original language | English |
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Pages (from-to) | 1288-1290 |
Number of pages | 3 |
Journal | Proceedings of International Meeting on Information Display |
Volume | 2 |
State | Published - 2006 |
Event | 5th International Meeting on Information Display - Seoul, Korea, Republic of Duration: 19 Jul 2005 → 23 Jul 2005 |