The effect of oxygen content on the electrical characteristics of ZnO

E. S. Jung; H. S. Kim; B. H. Kong; H. K. Cho; N. K. Park; H. S. Lee

doi:10.1002/pssb.200675151

The effect of oxygen content on the electrical characteristics of ZnO

E. S. Jung, H. S. Kim, B. H. Kong, H. K. Cho, N. K. Park, H. S. Lee

Research output: Contribution to journal › Article › peer-review

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Abstract

This work presents the influence of the variation of oxygen content in the ZnO films on their electrical characteristics. We applied the post-thermal annealing in N₂ and air ambient to control the oxygen content of ZnO films, which improved crystallinity and optical properties of ZnO films. The oxygen concentration was measured by Auger electron spectroscopy and the electrical characteristics were obtained by Hall measurement in the van der Pauw configuration and transmission line method. As result, it was shown that the electron concentration varies from 10¹⁶ to 10²¹/cm ³ while the resistivity from 10^-3 to tens ohm-cm with respect to Zn/O concentration ratio.

Original language	English
Pages (from-to)	1553-1559
Number of pages	7
Journal	Physica Status Solidi (B): Basic Research
Volume	244
Issue number	5
DOIs	https://doi.org/10.1002/pssb.200675151
State	Published - May 2007

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title = "The effect of oxygen content on the electrical characteristics of ZnO",

abstract = "This work presents the influence of the variation of oxygen content in the ZnO films on their electrical characteristics. We applied the post-thermal annealing in N2 and air ambient to control the oxygen content of ZnO films, which improved crystallinity and optical properties of ZnO films. The oxygen concentration was measured by Auger electron spectroscopy and the electrical characteristics were obtained by Hall measurement in the van der Pauw configuration and transmission line method. As result, it was shown that the electron concentration varies from 1016 to 1021/cm 3 while the resistivity from 10-3 to tens ohm-cm with respect to Zn/O concentration ratio.",

author = "Jung, \{E. S.\} and Kim, \{H. S.\} and Kong, \{B. H.\} and Cho, \{H. K.\} and Park, \{N. K.\} and Lee, \{H. S.\}",

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T1 - The effect of oxygen content on the electrical characteristics of ZnO

AU - Jung, E. S.

AU - Kim, H. S.

AU - Kong, B. H.

AU - Cho, H. K.

AU - Park, N. K.

AU - Lee, H. S.

PY - 2007/5

Y1 - 2007/5

N2 - This work presents the influence of the variation of oxygen content in the ZnO films on their electrical characteristics. We applied the post-thermal annealing in N2 and air ambient to control the oxygen content of ZnO films, which improved crystallinity and optical properties of ZnO films. The oxygen concentration was measured by Auger electron spectroscopy and the electrical characteristics were obtained by Hall measurement in the van der Pauw configuration and transmission line method. As result, it was shown that the electron concentration varies from 1016 to 1021/cm 3 while the resistivity from 10-3 to tens ohm-cm with respect to Zn/O concentration ratio.

AB - This work presents the influence of the variation of oxygen content in the ZnO films on their electrical characteristics. We applied the post-thermal annealing in N2 and air ambient to control the oxygen content of ZnO films, which improved crystallinity and optical properties of ZnO films. The oxygen concentration was measured by Auger electron spectroscopy and the electrical characteristics were obtained by Hall measurement in the van der Pauw configuration and transmission line method. As result, it was shown that the electron concentration varies from 1016 to 1021/cm 3 while the resistivity from 10-3 to tens ohm-cm with respect to Zn/O concentration ratio.

UR - https://www.scopus.com/pages/publications/34249062297

U2 - 10.1002/pssb.200675151

DO - 10.1002/pssb.200675151

M3 - Article

AN - SCOPUS:34249062297

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EP - 1559

JO - Physica Status Solidi (B): Basic Research

JF - Physica Status Solidi (B): Basic Research

IS - 5

ER -

The effect of oxygen content on the electrical characteristics of ZnO

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