The prioritization of the unit loads in the semiconductor/LCD fabrication facility

Jaewoo Chung, Kwanghee Kim, Seolhui Son

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The automated material handling systems today are playing ever more important roles in semiconductor/LCD fabrication facilities. Recently they became more flexible, intelligent, and speedy than in the past. The facilities have been fully automated because the size and weight of the unit loads used in the facilities were being increased beyond the limits that a human operator can handle. This research develops an efficient procedure to prioritize unit loads being delivered by the automated material handling system (AMHS). For this task, the research employs the event graph theory that has been successfully used in the both academia and industry. The developed procedure was applied to an actual LCD fabrication facility and improved the performance of an existing material handling system.

Original languageEnglish
Title of host publication21st International Conference on Production Research
Subtitle of host publicationInnovation in Product and Production, ICPR 2011 - Conference Proceedings
EditorsTobias Krause, Dieter Spath, Rolf Ilg
PublisherFraunhofer-Verlag
ISBN (Electronic)9783839602935
StatePublished - 2011
Event21st International Conference on Production Research: Innovation in Product and Production, ICPR 2011 - Stuttgart, Germany
Duration: 31 Jul 20114 Aug 2011

Publication series

Name21st International Conference on Production Research: Innovation in Product and Production, ICPR 2011 - Conference Proceedings

Conference

Conference21st International Conference on Production Research: Innovation in Product and Production, ICPR 2011
Country/TerritoryGermany
CityStuttgart
Period31/07/114/08/11

Keywords

  • Automated material handling system
  • Event graph model
  • LCD fabrication
  • Semiconductor fabrication

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