The properties of diamond-like carbon films prepared by r.f. discharges

K. W. Whang; H. S. Tae

doi:10.1016/0040-6090(91)90493-H

The properties of diamond-like carbon films prepared by r.f. discharges

K. W. Whang, H. S. Tae

School of Electronics Engineering

Seoul National University

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

Diamond-like carbon (DLC) films were produced by r.f. discharge decomposition of methane gas on an r.f.-powered, negatively self-biased electrode. The electrical, optical and mechanical properties of the films are found to be strongly dependent on the deposition conditions. Negative self-bias voltage and gas pressure are shown to be the two most important deposition parameters for accurate control over the properties of DLC films. The electrical resistivity, optical transparency, optical band gap and hardness were examined as functions of the r.f. power and gas pressure. Also, the crystallographic structure was examined by transmission electron microscopy and diamond microcrystals were observed in DLC films. An insulating, transparent, very hard film containing diamond microcrystals could be obtained under optimal conditions from the decomposition of CH₄ gas by a 13.56 MHz r.f. discharge.

Original language	English
Pages (from-to)	49-58
Number of pages	10
Journal	Thin Solid Films
Volume	204
Issue number	1
DOIs	https://doi.org/10.1016/0040-6090(91)90493-H
State	Published - 20 Sep 1991

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abstract = "Diamond-like carbon (DLC) films were produced by r.f. discharge decomposition of methane gas on an r.f.-powered, negatively self-biased electrode. The electrical, optical and mechanical properties of the films are found to be strongly dependent on the deposition conditions. Negative self-bias voltage and gas pressure are shown to be the two most important deposition parameters for accurate control over the properties of DLC films. The electrical resistivity, optical transparency, optical band gap and hardness were examined as functions of the r.f. power and gas pressure. Also, the crystallographic structure was examined by transmission electron microscopy and diamond microcrystals were observed in DLC films. An insulating, transparent, very hard film containing diamond microcrystals could be obtained under optimal conditions from the decomposition of CH4 gas by a 13.56 MHz r.f. discharge.",

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AB - Diamond-like carbon (DLC) films were produced by r.f. discharge decomposition of methane gas on an r.f.-powered, negatively self-biased electrode. The electrical, optical and mechanical properties of the films are found to be strongly dependent on the deposition conditions. Negative self-bias voltage and gas pressure are shown to be the two most important deposition parameters for accurate control over the properties of DLC films. The electrical resistivity, optical transparency, optical band gap and hardness were examined as functions of the r.f. power and gas pressure. Also, the crystallographic structure was examined by transmission electron microscopy and diamond microcrystals were observed in DLC films. An insulating, transparent, very hard film containing diamond microcrystals could be obtained under optimal conditions from the decomposition of CH4 gas by a 13.56 MHz r.f. discharge.

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The properties of diamond-like carbon films prepared by r.f. discharges

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