TY - GEN
T1 - Thermoreflectance imaging measurement of in-plane thermal properties of thin-film structures
AU - Wang, Xi
AU - Shakouri, Ali
AU - Mavrokefalos, Anastassios
AU - Lee, Yong
AU - Kong, Huijun
AU - Shi, Li
PY - 2010
Y1 - 2010
N2 - The study of thin film thermal properties is an important component of microelectronic and thermoelectric material research. Accurate measurements of such properties, especially in-plane thermal conductivity is known to be challenging. In this paper, we briefly review the thin film inplane thermal conductivity measurement methods that have been developed up to date, and demonstrate a new method with the utilization of thermoreflectance imaging technique. Preliminary measurement results for an InAlGaAs thin film sample are described.
AB - The study of thin film thermal properties is an important component of microelectronic and thermoelectric material research. Accurate measurements of such properties, especially in-plane thermal conductivity is known to be challenging. In this paper, we briefly review the thin film inplane thermal conductivity measurement methods that have been developed up to date, and demonstrate a new method with the utilization of thermoreflectance imaging technique. Preliminary measurement results for an InAlGaAs thin film sample are described.
KW - In-plane thermal conductivity
KW - Thermoreflectance
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=77952652087&partnerID=8YFLogxK
U2 - 10.1109/STHERM.2010.5444284
DO - 10.1109/STHERM.2010.5444284
M3 - Conference contribution
AN - SCOPUS:77952652087
SN - 9781424464586
T3 - Annual IEEE Semiconductor Thermal Measurement and Management Symposium
SP - 235
EP - 239
BT - 26th Annual IEEE Semiconductor Thermal Measurement and Management Symposium, SEMI-THERM 2010 - Proceedings 2010
T2 - 26th Annual IEEE Semiconductor Thermal Measurement and Management Symposium, SEMI-THERM 2010
Y2 - 21 February 2010 through 25 February 2010
ER -