@inproceedings{cbfc6dbccace4f339774f4f599595e8a,
title = "Thickness dependence of the crystallization of α-Fe2O 3/α-Al2O3(0001) thin films grown by sputterina",
abstract = "The crystallization of α-Fe2O3/α-Al 2O3(0001) thin films has been studied using real-time synchrotron x-ray scattering and atomic force microscope. In the sputter-grown amorphous films of various thicknesses at room temperature, we find the coexistence of α-Fe2O3 and Fe3O 4 interfacial crystallites (∼50-{\AA}-thick), well aligned to the α-Al2O3[0001] direction. The amorphous precursor is crystallized to the epitaxial α-Fe2O3 grains in three steps with annealing temperature; i) the growth of the well aligned α-Fe2O3 interfacial crystallites to approximately 200-{\AA}-thick, together with the transformation of the Fe3O 4 crystallites to the α-Fe2O3 crystallites (< 400°C), ii) the growth of the less aligned α-Fe2O3 grains on top of the well aligned grains (> 400°C), and iii) the nucleation of the different less aligned α-Fe2O3 grains directly on the α-Al 2O3 substrate (> 600°C). The surface evolution of the amorphous precursor films after annealing is consistent with the microstructure evolution during the crystallization.",
keywords = "Crystallization, Sputtering, Thickness dependence",
author = "Cho, {Tae Sik} and Yi, {Min Su} and Noh, {Do Young} and Don, {Seok Joo} and Je, {Jung Ho}",
year = "2007",
doi = "10.4028/3-908451-31-0.1213",
language = "English",
isbn = "3908451310",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd.",
number = "PART 2",
pages = "1213--1216",
booktitle = "Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia",
address = "Switzerland",
edition = "PART 2",
note = "IUMRS International Conference in Asia 2006, IUMRS-ICA 2006 ; Conference date: 10-09-2006 Through 14-09-2006",
}