@inproceedings{92034ffd3da647d5a815984a83429f24,
title = "Thin film micro carbon oxide sensor using MEMS process",
abstract = "Pt/Na+ ion conductive ceramics thin film/Pt/carbonate a2CO3:BaCO3=1:1.7 mol) structure micro CO2 sensors were prepared and their sensing properties were investigated. The thin film Na+ ion conductors formed by using RF magnetron sputtering technique. The chemical composition of thin film Na+ ion conductor was found to be same as that of NASICON(x=2). The nernst slope of 57 mV/decade or CO2 concentration range between 1,000 to 10,000 ppm was observed at the operating temperature of 400 °C.",
keywords = "Ceramics, Chemical sensors, Conductive films, Gas detectors, Magnetic sensors, Micromechanical devices, Radio frequency, Sputtering, Temperature distribution, Thin film sensors",
author = "Bang, {Yeung Il} and Song, {Kap Duk} and Huh, {Jeung Soo} and Oi, {Soon Don} and Lee, {Duk Dong}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215371",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "532--535",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "United States",
}