Abstract
A three electrode type sensor was fabricated. This sensor consists of two parts. One is a tin doped indium oxide (or indium tin oxide: denoted ITO hereafter) film. It was fabricated by the metal thermal oxidation method. This produces a large surface area and low resistivity. So, this film has two functions, a gas sensitive film and an effective heater. The other part is a platinum resistor line covered with oxidized aluminum film. This part is located in the backside of the sensor. It plays three roles. The first is a load resistor for a measuring system. Secondly, it also acts as a heater. Most of the consumed power in the sensor is used as the thermal energy of gas sensing. The last role is catalytic combustible gas sensing in high gas concentrations. In this paper, the fabrication method of gas sensitive ITO film is researched. A complex sensor structure is fabricated. It acts as a hot wire semiconductor sensor at low gas concentration and a combustible catalytic sensor at high concentration.
| Original language | English |
|---|---|
| Pages (from-to) | 31-35 |
| Number of pages | 5 |
| Journal | Sensors and Actuators, B: Chemical |
| Volume | 93 |
| Issue number | 1-3 |
| DOIs | |
| State | Published - 1 Aug 2003 |
| Event | Proceedings of the Ninth International Meeting on Chemical Engineering - Boston, MA, United States Duration: 7 Jul 2003 → 10 Jul 2003 |
Keywords
- Gas sensor
- ITO thin film
- Metal thermal oxidation