Toxic gas response of (In,Sn)O2/Pt nanowire sensors

Gi Hong Rue; Tae Hyun Ban; Nak Jin Choi; Jun Hyuk Kwak; Yeon Tae Lim; Duk Dong Lee; Jeung Soo Huh

doi:10.1109/SENSOR.2005.1497468

Toxic gas response of (In,Sn)O₂/Pt nanowire sensors

Gi Hong Rue, Tae Hyun Ban, Nak Jin Choi, Jun Hyuk Kwak, Yeon Tae Lim, Duk Dong Lee, Jeung Soo Huh

Kyungpook National University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C ₃H₉O₃P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH₃CN) as a simulant gas for blood gas. Sensing materials are Pt/SnO₂, where Pt layer (30 Å) is deposited on tin oxide film grown on alumina substrate, (Sn,In)O₂/Pt and SnO₂/Pt, where (Sn,In)O₂ and tin oxide films are deposited on Pt layer (30 Å) grown on alumina substrate, respectively. In the latter two sample have a nano-wire structure grown over thin film. The thickness of nano-wire is ∼ 60 nm. Nano-wire sensors grown on thin film show high sensitivity and stability to DMMP and CH₂CN. We display the results compared that of nano-wire with ordinary tin oxide sample.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1899-1902
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2005.1497468
State	Published - 2005
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	2

Conference

Conference	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Keywords

Chemical warfare agents
Nano-wire
Simulant gas
SnO/Pt

Access to Document

10.1109/SENSOR.2005.1497468

Cite this

Rue, G. H., Ban, T. H., Choi, N. J., Kwak, J. H., Lim, Y. T., Lee, D. D., & Huh, J. S. (2005). Toxic gas response of (In,Sn)O₂/Pt nanowire sensors. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1899-1902). Article 3E4.151 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2). https://doi.org/10.1109/SENSOR.2005.1497468

Rue, Gi Hong ; Ban, Tae Hyun ; Choi, Nak Jin et al. / Toxic gas response of (In,Sn)O₂/Pt nanowire sensors. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 1899-1902 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

@inproceedings{cfd804b6ef6f43d7a1c17bc10edda9f3,

title = "Toxic gas response of (In,Sn)O2/Pt nanowire sensors",

abstract = "Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C 3H9O3P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH3CN) as a simulant gas for blood gas. Sensing materials are Pt/SnO2, where Pt layer (30 {\AA}) is deposited on tin oxide film grown on alumina substrate, (Sn,In)O2/Pt and SnO2/Pt, where (Sn,In)O2 and tin oxide films are deposited on Pt layer (30 {\AA}) grown on alumina substrate, respectively. In the latter two sample have a nano-wire structure grown over thin film. The thickness of nano-wire is ∼ 60 nm. Nano-wire sensors grown on thin film show high sensitivity and stability to DMMP and CH2CN. We display the results compared that of nano-wire with ordinary tin oxide sample.",

keywords = "Chemical warfare agents, Nano-wire, Simulant gas, SnO/Pt",

author = "Rue, \{Gi Hong\} and Ban, \{Tae Hyun\} and Choi, \{Nak Jin\} and Kwak, \{Jun Hyuk\} and Lim, \{Yeon Tae\} and Lee, \{Duk Dong\} and Huh, \{Jeung Soo\}",

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Rue, GH, Ban, TH, Choi, NJ, Kwak, JH, Lim, YT, Lee, DD & Huh, JS 2005, Toxic gas response of (In,Sn)O₂/Pt nanowire sensors. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 3E4.151, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 2, pp. 1899-1902, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1497468

Toxic gas response of (In,Sn)O₂/Pt nanowire sensors. / Rue, Gi Hong; Ban, Tae Hyun; Choi, Nak Jin et al.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1899-1902 3E4.151 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Rue, Gi Hong

AU - Ban, Tae Hyun

AU - Choi, Nak Jin

AU - Kwak, Jun Hyuk

AU - Lim, Yeon Tae

AU - Lee, Duk Dong

AU - Huh, Jeung Soo

PY - 2005

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N2 - Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C 3H9O3P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH3CN) as a simulant gas for blood gas. Sensing materials are Pt/SnO2, where Pt layer (30 Å) is deposited on tin oxide film grown on alumina substrate, (Sn,In)O2/Pt and SnO2/Pt, where (Sn,In)O2 and tin oxide films are deposited on Pt layer (30 Å) grown on alumina substrate, respectively. In the latter two sample have a nano-wire structure grown over thin film. The thickness of nano-wire is ∼ 60 nm. Nano-wire sensors grown on thin film show high sensitivity and stability to DMMP and CH2CN. We display the results compared that of nano-wire with ordinary tin oxide sample.

AB - Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C 3H9O3P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH3CN) as a simulant gas for blood gas. Sensing materials are Pt/SnO2, where Pt layer (30 Å) is deposited on tin oxide film grown on alumina substrate, (Sn,In)O2/Pt and SnO2/Pt, where (Sn,In)O2 and tin oxide films are deposited on Pt layer (30 Å) grown on alumina substrate, respectively. In the latter two sample have a nano-wire structure grown over thin film. The thickness of nano-wire is ∼ 60 nm. Nano-wire sensors grown on thin film show high sensitivity and stability to DMMP and CH2CN. We display the results compared that of nano-wire with ordinary tin oxide sample.

KW - Chemical warfare agents

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KW - Simulant gas

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BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers

T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

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Rue GH, Ban TH, Choi NJ, Kwak JH, Lim YT, Lee DD et al. Toxic gas response of (In,Sn)O₂/Pt nanowire sensors. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1899-1902. 3E4.151. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05). doi: 10.1109/SENSOR.2005.1497468