Abstract
The ultraviolet (UV) responsive properties of the enhancement-mode n-channel Schottky-barrier MISFET (SB-MISFET), which was fabricated on a p-type GaN layer grown on silicon substrate, were investigated. The drain leakage current of the MISFET is less than 1 nA/mm2, which is quite low compared to recently reported photodetectors. The MISFET exhibited a cutoff wavelength of 365 nm, and the UV/visible rejection ratio was about 120 near the threshold voltage. This is the first demonstration of the MISFET-type UV photodetector, which is highly applicable to the UV image sensors.
| Original language | English |
|---|---|
| Pages (from-to) | 656-658 |
| Number of pages | 3 |
| Journal | IEEE Electron Device Letters |
| Volume | 27 |
| Issue number | 8 |
| DOIs | |
| State | Published - Aug 2006 |
Keywords
- GaN
- MISFET
- Schottky barrier
- Ultraviolet (UV) photodetector