@inproceedings{f084f4e128054a4694f78040a8442bfe,
title = "Vanadium oxide-based bolometric infrared spectrometer",
abstract = "The proposed micro-spectrometer consists of multi-slit grating and bolometric IR detector array. The grating is used for dispersion of an incident optical radiation into different wavelength components. The grating pattern is made by metal RIE of aluminum deposited on dielectric membrane, which is fabricated over silicon wafer. The IR detector part adopts a resistive bolometer that changes its resistance when a temperature change occurs. Due to the temperature rise by an incident IR ray, the presence of IR can be detected by knowing the resistance change on the bolometer. For the material of resistive bolometer, vanadium oxide is utilized. Vanadium oxide is adopted for resistive bolometer in this work because of its high TCR.",
keywords = "Infrared, IR sensor, Spectrometer, Vanadium oxide",
author = "Yang, {Jae Chang} and Ho Jung and Kong, {Seong Ho}",
year = "2007",
doi = "10.1117/12.732358",
language = "English",
isbn = "9780819469199",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Smart Biomedical and Physiological Sensor Technology V",
note = "Smart Biomedical and Physiological Sensor Technology V ; Conference date: 10-09-2007 Through 11-09-2007",
}