Vertically-Aligned Carbon Nanotubes-Embedded PDMS Microstructures for Flexible Tactile Sensor Array with High Sensitivity and Durability

Sangjun Sim, Kyubin Bae, Yunsung Kang, Eunhwan Jo, Hyunjun Han, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper reports a flexible tactile sensor array based on vertically aligned carbon nanotubes (CNTs)-embedded polydimethylsiloxane (PDMS) microstructures with high sensitivity and durability. The CNTs-embedded PDMS microstructures are fabricated by synthesizing vertically aligned bundles on a quadrangular pyramid-etched silicon mold and transferring them to the PDMS. This structure shows the mechanical robustness originating from axially grown CNTs. Furthermore, after transferring the CNTs from the mold, the top of the CNTs are exposed on the surface of the PDMS structure. These exposed CNTs provide an electrical connection with an electrode as well as a sensitive change in the contact area when the pressure is applied. The number of contact points between embedded CNTs also increases as the applied pressure, leading to a highly sensitive response to tactile stimulation. The tactile sensor array with microstructured CNT-PDMS composites recognizes the location and magnitude of the applied load.

Original languageEnglish
Title of host publication35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages706-709
Number of pages4
ISBN (Electronic)9781665409117
DOIs
StatePublished - 2022
Event35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 9 Jan 202213 Jan 2022

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2022-January
ISSN (Print)1084-6999

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/TerritoryJapan
CityTokyo
Period9/01/2213/01/22

Keywords

  • flexible tactile sensors
  • high durability
  • high sensitivity
  • vertically aligned carbon nanotubes

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