@inproceedings{d342fc553a3e4e8097a31bd77d55f52f,
title = "Vertically-Aligned Carbon Nanotubes-Embedded PDMS Microstructures for Flexible Tactile Sensor Array with High Sensitivity and Durability",
abstract = "This paper reports a flexible tactile sensor array based on vertically aligned carbon nanotubes (CNTs)-embedded polydimethylsiloxane (PDMS) microstructures with high sensitivity and durability. The CNTs-embedded PDMS microstructures are fabricated by synthesizing vertically aligned bundles on a quadrangular pyramid-etched silicon mold and transferring them to the PDMS. This structure shows the mechanical robustness originating from axially grown CNTs. Furthermore, after transferring the CNTs from the mold, the top of the CNTs are exposed on the surface of the PDMS structure. These exposed CNTs provide an electrical connection with an electrode as well as a sensitive change in the contact area when the pressure is applied. The number of contact points between embedded CNTs also increases as the applied pressure, leading to a highly sensitive response to tactile stimulation. The tactile sensor array with microstructured CNT-PDMS composites recognizes the location and magnitude of the applied load.",
keywords = "flexible tactile sensors, high durability, high sensitivity, vertically aligned carbon nanotubes",
author = "Sangjun Sim and Kyubin Bae and Yunsung Kang and Eunhwan Jo and Hyunjun Han and Jongbaeg Kim",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",
year = "2022",
doi = "10.1109/MEMS51670.2022.9699624",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "706--709",
booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",
address = "United States",
}