Abstract
In this research, the resonant characteristics and the modes of a film bulk acoustic wave resonator (FBAR) used in the RF frequency region of a few gigahertz was evaluated from its impedance by using a modal analysis with the three-dimensional finite element method. In particular, the spurious characteristics caused by variations in the electrode area, as well as all the resonant modes and the mode shapes, were analyzed. From these results, the optimum ratio of length to thickness for the FBAR, to be fabricated is 20:1, and the minimum ratio to operate the fundamental thickness vibration mode is 5:1.
| Original language | English |
|---|---|
| Pages (from-to) | L648-L650 |
| Journal | Journal of the Korean Physical Society |
| Volume | 43 |
| Issue number | 5 I |
| DOIs | |
| State | Published - Nov 2003 |
Keywords
- Film bulk acoustic wave resonator
- Finite element
- RF